Novel submicron infrared microspectroscopy for failure analysis of semiconductor devices

Technik: IR Raman

Anwendungen: Polymers & Materials Science, Quality Assurance

Products: KnowItAll IR Spectral Library, KnowItAll Raman Spectral Library, KnowItAll Software

Semiconductors are omnipresent in everyday life and non-destructive analysis techniques are critical to ensure that the semiconductor works as planned. This Photothermal Spectroscopy Corp. Study uses optical photothermal infrared (O-PTIR) spectroscopy coupled with Raman spectroscopy to perform failure analysis in semiconductors. The resulting spectra were imported into KnowItAll Software and a simultaneous search against both IR and Raman spectral libraries was performed to confirm the identity of the unknowns. This increased the accuracy and confidence of the Raman and the IR data.

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